Fabrication and Beta-Ray Source Test of Double-Sided Silicon Strip Sensor
スポンサーリンク
概要
- 論文の詳細を見る
Since a double-sided silicon strip sensor provides two-dimensional position information with high resolution, it has been developed for various uses as a medical imaging sensor, radiation detector, sensing detector in space science, and a silicon vertexing/tracking detector in experimental particle physics. We designed and fabricated a double-sided silicon position sensor in a 5 in. fabrication line. Silicon nitride with a silicon oxide layer was used to prevent damage during sensor fabrication. Since the temperature dependences of the silicon nitride and the silicon oxide are different, the thicknesses of the Si3N4 and SiO2 layers were optimized using the ATHENA process simulation to avoid cracks. We present the measurement results of the electrical characteristics of the sensor such as leakage current and capacitance as a function of reverse bias voltage. We performed tests on the sensor using a 90Sr radioactive source and measured the signal-to-noise ratio of the prototype sensor.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-03-15
著者
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JUNG S.
Department of Physiology, College of Medicine, Kangwon National University
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KANG H.
Department of Energy & Resources Engineering, The University of Dong-A
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Bae J.
Department Of Physics Kyungpook National University
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Kim H.
Department Of Advanced Materials Science The University Of Tokyo
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Kim D.
Department Of Electronics Engineering Kookmin University
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Kim Y.
Department Of Conservative Dentistry School Of Dentistry Kyungpook National University
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Park Hwanbae
Department of Physics, Kyungpook National University, Daegu 702-701, Korea
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Hyun H.
Department of Physics, Kyungpook National University, Daegu 702-701, Korea
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Kah D.
Department of Physics, Kyungpook National University, Daegu 702-701, Korea
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Ryu S.
Department of Physics, Kyungpook National University, Daegu 702-701, Korea
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Shim D.
Department of Physics, Kyungpook National University, Daegu 702-701, Korea
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Lee Jik
School of Physics, Seoul National University, Seoul 151-747, Korea
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Doh S.
Department of Physics, Pukyong National University, Pusan 608-020, Korea
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Kim Y.
Department Of Physics Kyungpook National University
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Lee Jik
School Of Physics Seoul National University
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Park Hwanbae
Department Of Physics Kyungpook National University
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Kim Y.
Department Of Chemical And Biomolecular Engineering Kaist
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Kim H.
Department Of Physics Kyungpook National University
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Kim D.
Department Of Physics Daegu University
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Doh S.
Department Of Physics Pukyong National University
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Jung S.
Department Of Physiology College Of Medicine Kangwon National University
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Kah D.
Department Of Physics Kyungpook National University
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Shim D.
Department Of Physics Kyungpook National University
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Jung S.
Department of Environmental Engineering, Sunchon National University, 315 Maegok-dong, Sunchon, Chonnam 540-742, Korea
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