Preparation of Lithium Niobate Thin Film by Thermal Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Polycrystalline LiNbO3 films were prepared using the metalorganic compounds, Li(DPM) and Nb(OC2H5)5, by thermal chemical vapor deposition at 5 Torr in the temperature range of 873–1023 K. The range of operation conditions for pure LiNbO3 growth using Nb(OC2H5)5 is wider than that using Nb(DPM)2Cl3 as the Nb source. The distribution of growth rate in the reactor and that of step coverage in chemical-vapor-deposited LiNbO3 are governed by the Nb2O5 growth process, and the reactivity of Nb(OEt)5 is considerably higher than that of Nb(DPM)2Cl3.
- 2003-08-15
著者
-
YOSHIDA M.
Department of Applied Science for Electronics and Materials, Kyushu University
-
AKIYAMA Y.
Department of Applied Science for Electronics and Materials, Kyushu University
-
Imaishi N.
Institute For Materials Chemistry And Engineering Kyushu University
-
Shin Y.
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga-koen, Kasuga-shi, Fukuoka 816-8580, Japan
-
Jung S.
Department of Environmental Engineering, Sunchon National University, 315 Maegok-dong, Sunchon, Chonnam 540-742, Korea
関連論文
- Modulation of Ca_V2.3 Calcium Channel Currents by Eugenol
- Preparation of Lithium Niobate Thin Film by Thermal Chemical Vapor Deposition
- Eugenol Inhibits K^+ Currents in Trigeminal Ganglion Neurons
- Eugenol Inhibits Sodium Currents in Dental Afferent Neurons
- Magnesian Tourmaline (Dravite) from the Umpavalli Area in the Eastern Ghats of India
- Curcumin Produces an Antihyperalgesic Effect via Antagonism of TRPV1
- Geochronological Constraints on Granulite Formation in Southern India : Implications for East Gondwana Reassembly
- Adult Rat Odontoblasts Lack Noxious Thermal Sensitivity
- Oscillatory Marangon Flow in Half-Zone Liquid Bridge of Molten Tin(Marangoni Convection Modeling Research, 2003-2004)
- C317 NUMERICAL SIMULATION OF THREE DIMENSIONAL OSCILLATORY FLOW IN HALF-ZONE BRIDGES OF LOW PR FLUID(Marangoni convection)
- Fabrication and Beta-Ray Source Test of Double-Sided Silicon Strip Sensor
- A case of hereditary sensory neuropathy (type 2) : Abstracts of Papers Presented at the Thirty-Fourth Annual Meeting of the Japanese Teratology Society Kochi, Japan July14-16, 1994
- Investigation of Opitz (hypertelorism-hypospadias) syndrome and its related cases : Abstracts of Papers Presented at the Thirty-First Annual Meeting of the Japanese Teratology Society Izumo, Japan, July 11-12, 1991
- A rare case of giant congenital lymphangioma of a child extending from the hip to the lower extremity : Abstracts of Papers Presented at the Thirtieth Annual Meeting of the Japanese Teratology Society Miyazaki, Japan, July 12-13, 1990
- Familial blepharophimosis syndrome : Abstracts of Papers Presented at the 29th Annual Meeting of the Japanese Teratology Society, Yamagata, Japan July 13 - 14
- Effect of whisker surface treatment on the strength of Al_B_4O_/Al alloy composites
- Preparation and characterization of aluminum borate whisker reinforced magnesium alloy composites by semi-solid process
- Substance P Sensitizes P2X3 in Nociceptive Trigeminal Neurons
- P-16. Effects of feeding and cholecystokinin-octapeptide (CCK-8) administration on the somatotropic axis of goats around weaning(Abstracts of the International Symposium on Recent Advances in Animal Science(IS-RAAS),Joint meeting of 2^ IS-AS and 3^
- Paraneoplastic Limbic Encephalitis : A Case Responsive to Double Filtration Plasmapheresis and Chemotherapy : Neurological Disease
- A New Method of Grain Imaging for Highly Grain-Oriented Silicon Steels
- Application of PSP to Low Density Gas Flows
- CAROTID STENTING VS. CAROTID ENDARTERECTOMY : OUR EXPERIENCE
- Microgravity Experiments on the Marangoni Convection(Abstract from International Seminar on Manufacturing of Advanced Materials)
- Inhibition of ischemic hippocampal neuronal death in primates with cathepsin B inhibitor CA-074 : a novel strategy for neuroprotection based on "calpain-cathepsin hypothesis
- A New Method of Grain Imaging for Highly Grain-Oriented Silicon Steels
- Preparation of Lithium Niobate Thin Film by Thermal Chemical Vapor Deposition
- Pathological examination of spinal lesions in meningeal carcinomatosis
- Interleukine-8 Blockage Decreases the Oxygen Free Radical Production by Zimozan-Stimulated Leukocytes in a Rabbit Endotoxic Shock Model
- Electron microprobe dating of monazite from the Chittikara granulite, south India : Evidence for polymetamorphic events
- Explosive-Driven Cylindrical Imploding Shocks in Solid Initiated with an Exploded Etched Copper Mesh
- Effect of parameters on performance of two-stage swirl-flow fluidized bed coal combustors.