High-resolution transmission electron microscopy and electron energy-loss spectroscopy study of polycrystalline-Si/ZrO_2/SiO_2/Si metal-oxide-semiconductor structures
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概要
- 論文の詳細を見る
- 2006-01-01
著者
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YANG Jun-Mo
National Nanofab Center, Measurement & Analysis
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Kim Joong
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Yang Jun-mo
National Nanofab Center
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KIM Kyung-Seob
Department of Electronic Engineering, Yeojoo Institute of Technology
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Kawasaki Masahiro
Jeol Ltd.
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Kim Kyung-seob
Department Of Electronic Engineering Yeojoo Institute Of Technology
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LEE Wan-Gyu
National Nanofab Center
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Kawasaki Masahiro
Jeol Ltd
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Kim Joong
Institute Of Molecular Biology And Genetics And Department Of Molecular Biology Seoul National Unive
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Kim Joong
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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Kawasaki Masahiro
JEOL Co. Ltd
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