MEMS用撥水性シリル化コーティング技術

概要

論文の詳細を見る
A gas-phase water-repellent silanization coating technique, which prevents the microscopic structures used for micro-sensors and micro-electro-mechanical systems (MEMS) from sticking to the silicon substrates and other microscopic structures during operation, have been developed. Use of a water-repellent coating is one method that prevents sticking by reducing the surface energy of the structure. The water-repellency characteristics of three types of organosilicon compounds were evaluated. It was found that a water-repellent silanization coating layer using (tridecafluoro - 1, 1, 2, 2 -tetrahydrooctyl) trichlorosilane (C8H4Cl3F13Si) had most excellent durability. It was confirmed that the water contact angle of C8H4Cl3F13Si coating layer is exceeding 90 degrees at surface of standard semiconductor materials except nickel. In addition, the C8H4Cl3F13Si coating layer can be patterned by ultraviolet irradiation.
社団法人電気学会の論文
2006-03-01