Effects of Axial Magnetic Field on Neutral Beam Etching by Low-Angle Forward-Reflected Neutral Beam Method
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2005-02-10
著者
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LEE Dohaing
Department of Materials Engineering, SungKyunKwan University
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Yeom Geunyoung
Department of Materials Engineering, SungKyunKwan University
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Lee Dohaing
Department Of Materials Engineering Sungkyunkwan University
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Yeom Geunyoung
Department Of Materials Engineering Sungkyunkwan University
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PARK ByungJae
Department of Materials Engineering, Sungkyunkwan University
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Park Byungjae
Department Of Materials Engineering Sungkyunkwan University
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Yeom Geunyoung
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
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- Effects of Axial Magnetic Field on Neutral Beam Etching by Low-Angle Forward-Reflected Neutral Beam Method
- Effects of Axial Magnetic Field on Neutral Beam Etching by Low-Angle Forward-Reflected Neutral Beam Method
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