Yeom Geunyoung | Department of Materials Engineering, SungKyunKwan University
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概要
関連著者
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LEE Dohaing
Department of Materials Engineering, SungKyunKwan University
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Yeom Geunyoung
Department of Materials Engineering, SungKyunKwan University
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Lee Dohaing
Department Of Materials Engineering Sungkyunkwan University
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Yeom Geunyoung
Department Of Materials Engineering Sungkyunkwan University
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Park S
Electronics And Telecommunications Res. Inst. Taejon Kor
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CHUNG Minjae
Department of Materials Engineering, SungKyunKwan University
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PARK Sangduk
Department of Materials Engineering, SungKyunKwan University
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Chung Minjae
Department Of Materials Engineering Sungkyunkwan University
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PARK ByungJae
Department of Materials Engineering, Sungkyunkwan University
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Park S
Department Of Materials Engineering Sungkyunkwan University
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Park Byungjae
Department Of Materials Engineering Sungkyunkwan University
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Yeom Geunyoung
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, South Korea
著作論文
- Damage during SiO_2 Etching by Low-Angle Forward Reflected Neutral Beam : Instrumentation, Measurement, and Fabrication Technology
- Effects of Axial Magnetic Field on Neutral Beam Etching by Low-Angle Forward-Reflected Neutral Beam Method