Specular Surface Morphology of Aluminum-Implanted 4H-SiC(0001) by SiH_4-Added Ar Anneal
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概要
- 論文の詳細を見る
- 2004-01-15
著者
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TAKAMI Tetsuya
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Takami Tetsuya
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Ohtsuka Ken-ichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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FUJIHIRA Keiko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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TARUI Yoichiro
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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IMAIZUMI Masayuki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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OZEKI Tatsuo
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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