Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata

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概要

• 論文の詳細を見る
• 電気学会の論文
• 2004-01-01

著者

• ISONO Yoshitada

  Ritsumeikan Univ.

• TABATA Osamu

  Ritsumeikan University

• Isono Yoshitada

  Ritsumeikan University

• Ehrmann K.

  University Of Freiburg

• KAKINAGA Takamitsu

  Ritsumeikan University

• BABA Noriaki

  Ritsumeikan University

• KORVINK J.

  University of Freiburg

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• Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip
• Micor Fluxgate Magnetic Sensor Interface Circuits Using △Σ Modulation
• Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata
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