Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices(Optical Passive Devices and Modules, <Joint Special Section>Recent Progress in Optoelectronics and Communications)
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概要
- 論文の詳細を見る
This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.
- 社団法人電子情報通信学会の論文
- 2005-05-01
著者
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Katayama Makoto
Sumitomo Electric Industries Ltd.
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SHIMAZU Takayuki
Sumitomo Electric Industries, Ltd.
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ISONO Yoshitada
Ritsumeikan Univ.
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Shimazu Takayuki
Sumitomo Electric Industries Ltd.
関連論文
- Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices(Optical Passive Devices and Modules, Recent Progress in Optoelectronics and Communications)
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- Some Effects of Over Coated Metal for the Mechanical Property Improvement of Bond Bridge of Porous Metal Bonded Diamond Wheel