形状剛性変化型の振動式加速度センサ

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概要

• 論文の詳細を見る

• We propose a surface micromachined simple resonant accelerometer based on the principle of a resonator rigidity change. The sensor consists of a parallel beam resonator and a mass. The rigidity change of the resonator is induced with a change in the cross-sectional shape of the resonator. The feasibility of this sensing principle was confirmed by FEM analysis. The FEM analysis revealed that a frequency change ratio of 10%/g and 5%/g were obtained for the basic structure and the double resonator structure, respectively. Furthermore, we confirmed that the double resonator structure had a lower cross-axis sensitivity.

• 社団法人 電気学会の論文
• 1998-09-01

著者

• TABATA Osamu

  Ritsumeikan University

• OMURA Yoshiteru

  Toyota Central R&D Labs., Inc.

• NONOMURA Yutaka

  Toyota Central R&D Labs., Inc.

• Nonomura Yutaka

  Toyota Central R&d Labs. Inc.

• Omura Yoshiteru

  Toyota Central R&d Labs. Inc.

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