Electrical Properties and Thermodynamic Stability of Sr(Ti_<1-x>, Ru_x)O_3 Thin Films Deposited by Inductive-Coupling-Plasma-Induced RF Magnetron Sputtering
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-01
著者
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KAWAKUBO Takashi
Advanced Discrete Semiconductor Technology Laboratory, Corporate Research & Development Center, Tosh
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Yoshiki Masahiko
Material Analysis Group Corporate Research And Development Center Toshiba Corp.
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SCHIMIZU Tatsuo
Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation
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Schimizu Tatsuo
Advanced Lsi Technology Laboratory Corporate Research And Development Center Toshiba Corp.
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OHARA Ryoichi
Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corp.
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SANO Kenya
Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corp.
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- Epitaxial Growth of BaTiO_3 Thin Films by High Gas Pressure Sputtering
- Asymmetric Switching of Ferroelectric Polarization in a Heteroepitaxial BaTiO_3 Thin Film Capacitor
- Thickness Dependence of Ferroelectricity in Heteroepitaxial BaTiO_3 Thin Film Capacitors
- High quality La aluminates/Si (100) interface realized by passivation of Si dangling bonds with one monolayer epitaxial SrSi_2
- Electrical Properties and Thermodynamic Stability of Sr(Ti_, Ru_x)O_3 Thin Films Deposited by Inductive-Coupling-Plasma-Induced RF Magnetron Sputtering
- Enhancement of Dielectric Constant due to Expansion of Lattice Spacing in CeO_2 Directly Grown on Si(111)
- Growth of Epitaxial SrTiO_3 on Epitaxial(Ti, Al)N/Si(100)Substrate Using Ti-Buffer Layer(Special Issue on Nonvolatile Memories)
- First-Principles Study on Electronic Structure and Thermodynamic Stability of Sr(Ti,Ru)O_3 : Electrical Properties of Condensed Matter
- Electrical Properties and Thermodynamic Stability of Sr(Ti1-x,Rux)O3 Thin Films Deposited by Inductive-Coupling-Plasma-Induced RF Magnetron Sputtering
- Bistable States of Ferroelectric Hysteresis Loops in a Heteroepitaxial BaTiO3 Thin Film Capacitor