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Production Engineering Research Laboratory Hitachi Ltd. | 論文
- Local lattice parameter determination of a silicon (001) layer grown on a sapphire (1102) substrate using convergent-beam electron diffraction
- Lattice parameter determination of a composition controlled Si_Ge_x layer on a Si (001) substrate using convergent-beam electron diffraction
- Space-Group Determination of a New Superconductor (Nd_Ce_x)_2(Ba_Nd_y)_2Cu_3O_ using Convergent-Beam Electron Diffraction
- Space-Group Determination of a New Superconductor (Nd_Sr_Ce_)_2CuO_ Using Convergent-Beam Electron Diffraction
- Lattice parameter determination of a strained area of an InAs layer on a GaAs substrate using CBED
- Site-Specific Studies on X-Ray Magnetic Circular Dichroism at Fe K Edge for Transition-Metal Ferrites
- X-Ray Diffuse Scattering Study of Magnetite by the Valence-Difference Contrast Method
- Proposal of a Next-Generation Super Resolution Technique
- Photolithography System Using Modified Illumination
- Photolithography System Using a Combination of Modified Illumination and Phase Shift Mask
- Photolithography System Using Annular Illumination : Photolithography
- Photolithography System Using Annular Illumination
- Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing
- Improvement of n-Type Poly-Si Film Properties by Solid Phase Crystallization Method
- Development of New a-Si/c-Si Heterojunction Solar Cells: ACJ-HIT (Artificially Constructed Junction-Heterojunction with Intrinsic Thin-Layer)
- Mechanism for generation of voids bounded on Cu conductors in Cu/glass ceramic co-fired multilayer wiring substrates
- Borosilicate glasses with high softening points for glass-ceramic/copper multilayer substrates
- Effect of Cu conductor properties on crack generation around through holes of Cu/glass ceramic co-fired substrate
- Electron Diffraction Study of Ba_2YCu_3O_(y=0.1-0.2)
- Absolute Measurement of Lattice Spacing d(220)in Floating Zone Silicon Crystal