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Ntt Telecommunications Energy Lab. Kanagawa Jpn | 論文
- A Beam Drift Reduction Device for the X-Ray Mask E-Beam Writer, EB-X2
- Basic Characteristics of Beam Position Drift and Field Stitching Error Caused by Electron Beam Column Charging
- Lattice Deformation and Ga Diffusion Concerning InAs Self-Assembled Quantum Dots on GaAs(100) as a Function of Growth Interruption Time
- Crystallographic Properties of Closely Stacked InAs Quantum Dots Investigated by Ion Channeling
- Interdiffusion between InAs Quantum Dots and GaAs Matrices
- Waveguide-Integrated Si Nano-Photodiode with Surface-Plasmon Antenna and its Application to On-chip Optical Clock Distribution
- A Study on the Design and Properties of an SiON/SiO_2 Waveguide : The Effect of the Substrate on Propagation Loss
- LSI on-chip optical interconnection with Si nano-photonics
- Spectral responsivity of Ge pin photodiodes on silicon-on-insulator via selective epitaxial growth (光エレクトロニクス)
- Polarization splitter and rotator for polarization diversity system in silicon-based micro-photonic circuits (光エレクトロニクス)
- Photonic-Band-Gap Waveguides and Resonators in SOI Photonic Crystal Slabs(Photonic Crystals and Their Device Applications)
- Microphotonics Devices Based on Silicon Wire Waveguiding System(Photonic Crystals and Their Device Applications)
- GaInAs/GaAs Micro-Arc Ring Semiconductor Laser
- Design and Lasing Operation of Micro-Arc-Ring Lasers
- Effect of Post-Growth Annealing on Morphology of Ge Mesa Selectively Grown on Si
- Neutral Stream Extraction from Electron Cyclotron Resonance Plasma by Using Parallel Magnetic Field
- Generation of Electron Cyclotron Resonance Neutral Stream and Its Application to Si Etching
- Electron Cyclotron Resonance Plasma Etching of α-Ta for X-Ray Mask Absorber Using Chlorine and Fluoride Gas Mixture
- Etching Characteristics of α-Type Ta Film Using Cl_2 Electron Cyclotron Resonance(ECR)Plasma
- Development of Highly Accurate X-Ray Mask with High-Density Patterns