INOUE Kohji | Department of Electrical Engineering, Faculty of Engineering Schience, Osaka University
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概要
- 同名の論文著者
- Department of Electrical Engineering, Faculty of Engineering Schience, Osaka Universityの論文著者
関連著者
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Hamakawa Yoshihiro
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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INOUE Kohji
Department of Electrical Engineering, Faculty of Engineering Schience, Osaka University
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Okuyama Masanori
Faculty Of Engineering Science Osaka University
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Fujiki Noriaki
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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FUJIKI Noriaki
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Hamakawa Y
Faculty Of Science And Engineering Ritsumeikan University
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TOYODA Yukio
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Toyoda Y
Chubu Univ. Aichi Jpn
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TOYODA Yoshihiko
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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MICHIMORI Masanori
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Michimori Masanori
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Hamakawa Yoshihiro
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560
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Nakatani Yoshiki
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560
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Inoue Kohji
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560
著作論文
- Growth of SiO_2 Thin Film by Selective Excitation Photo-CVD Using 123.6 nm VUV Light : Silicon Devices and Process Technologies(Solid State Devices and Materials 1)
- Growth of Oriented Si Film on Quartz from Si_3H_8 by thermal and Photo-CVD Using a D_2 Lamp : Surfaces, Interfaces and Films
- SiO_2 Thin Film Prepared from Si_3H_8 and O_2 by Photo-CVD Using Double Excitation
- Preparation of SiO_2 Film by Photo-Induced Chemical Vapor Deposition Using a Deuterium Lamp and Its Annealing Effect
- Low Temperature Growth of SiO_2 Thin Film by Double-Excitation Photo-CVD
- Highly Oriented Polycrystalline Si Film on Quartz Grown from Si3H8 by Thermal and Photo-CVD