Kubo Maki | Device Development Center Hitachi Ltd.
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概要
関連著者
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Kubo Maki
Device Development Center Hitachi Ltd.
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Imai Toshinori
Device Development Center Hitachi Ltd.
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NOGUCHI Junji
Hitachi, Ltd., Micro Device Division
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KUBO Maki
Hitachi, Ltd., Micro Device Division
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TAKEDA Ken-ichi
Hitachi, Ltd., Central Research Laboratory
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OHASHI Naofumi
Semiconductor Leading Edge Technologies, Inc.
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NOGUCHI Junji
Device Development Center, Hitachi Ltd.
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Ito Yuko
Device Development Center, Hitachi, Ltd.
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Ohashi Naofumi
Device Development Center Hitachi Ltd.
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SAITO Tatsuyuki
Hitachi, Ltd., Micro Device Division
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MARUYAMA Hiroyuki
Hitachi, Ltd., Micro Device Division
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SAITO Tatsuyuki
Device Development Center, Hitachi Ltd.
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Noguchi Junji
Device Development Center Hitachi Ltd.
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Maruyama Hiroyuki
Hitachi Ltd. Micro Device Division
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Saito Tatsuyuki
Device Development Center Hitachi Ltd.
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TSUNEDA Ruriko
Hitachi, Ltd., Central Research Laboratory
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MIURA Noriko
Renesas Technology Corp.
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MAKABE Kazuya
Renesas Technology Corp.
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Ito Yuko
Device Development Center Hitachi Ltd.
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Ito Yuko
Device Development Center, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
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Noguchi Junji
Device Development Center, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
著作論文
- Dependence of Time-Dependent Dielectric Breakdown Lifetime on the Structure in Cu Metallization
- Influence of Cu-Ion Migration and Fine-Line Effect on Time-Dependent Dielectric Breakdown Lifetime of Cu Interconnects
- Impact of Self-Aligned Metal Capping Method on Submicron Copper Interconnections
- Impact of Self-Aligned Metal Capping Method on Submicron Copper Interconnections