SUGIMOTO Yoshimasa | Optoelectronics Technology Research Laboratory
スポンサーリンク
概要
関連著者
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SUGIMOTO Yoshimasa
Optoelectronics Technology Research Laboratory
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Sugimoto Y
Department Of Research And Development Nichia Chemical Industries Ltd
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Akita K
Optoelectronics Technology Research Laboratory
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Hidaka Hiroshi
Optoelectronics Technology Research Laboratory
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Taneya M
Devices Technology Research Laboratories Sharp Corporation
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Taneya Mototaka
Central Research Laboratories Engineering Center Sharp Corporation
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AKITA Kenzo
Optoelectronics Technology Research Laboratory
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Ishikawa T
Riken Harima Institute
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Ishikawa T
National Space Dev. Agency Of Japan Ibaraki Jpn
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Ishikawa T
Kyushu Univ. Fukuoka Jpn
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TANAKA Nobuyuki
The Kochi Prefectural Makino Botanical Garden
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Tanaka N
Environmental Sci. Res. Niigata Niigata Jpn
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Ishikawa Tetsuya
Riken Harima Institute
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Kawanishi Hideo
Department Of Electonic Engineering Kogakuin University
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Ishikawa Tomonori
Fujitsu Limited
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Ishikawa Tomonori
Optoelectronics Technology Research Laboratory
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Ishikawa Takatoshi
Department Of Applied Physics Faculty Of Science Fukuoka University
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TANAKA Nobuyuki
Optoelectronics Technology Research Laboratory
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TANEYA Mototaka
Optoelectronics Technology Research Laboratory
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Kawanishi H
Department Of Electronic Engineering Kohgakuin University
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KAWANISHI Hidenori
Optoelectronics Technology Research Laboratory
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Tanaka N
The Kochi Prefectural Makino Botanical Garden
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Ohki Yoshimasa
Optoelectronics Technology Research Laboratory
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HIRATANI Yuji
Optoelectronics Technology Research Laboratory
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Taneya Mototaka
Central Research Laboratories Corporate R & D Group Sharp Corporation
著作論文
- Selective Area Epitaxy of GaAs Using GaAs Oxide as a Mask
- Fine Pattern Formation of Gallium Arsenide by In Situ Electron-Beam Lithography Using an Ultrathin Surface Oxide as a Resist
- Electron-Beam-Induced Cl_2 Etching of GaAs
- Sub-100 nm Patterning of GaAs Using In Situ Electrom Beam Lithography
- Role of an Electron Beam in the Modification of a GaAs Oxide Mask for in situ EB Lithography