Akita K | Optoelectronics Technology Research Laboratory
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概要
関連著者
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Akita K
Optoelectronics Technology Research Laboratory
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Hidaka Hiroshi
Optoelectronics Technology Research Laboratory
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Taneya M
Devices Technology Research Laboratories Sharp Corporation
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Taneya Mototaka
Central Research Laboratories Engineering Center Sharp Corporation
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SUGIMOTO Yoshimasa
Optoelectronics Technology Research Laboratory
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AKITA Kenzo
Optoelectronics Technology Research Laboratory
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Sugimoto Y
Department Of Research And Development Nichia Chemical Industries Ltd
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TANEYA Mototaka
Optoelectronics Technology Research Laboratory
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Ohki Yoshimasa
Optoelectronics Technology Research Laboratory
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HIRATANI Yuji
Optoelectronics Technology Research Laboratory
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Taneya Mototaka
Central Research Laboratories Corporate R & D Group Sharp Corporation
著作論文
- Selective Area Epitaxy of GaAs Using GaAs Oxide as a Mask
- Fine Pattern Formation of Gallium Arsenide by In Situ Electron-Beam Lithography Using an Ultrathin Surface Oxide as a Resist
- Electron-Beam-Induced Cl_2 Etching of GaAs