SOMEMURA Yoh | NTT LSI Laboratories
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概要
関連著者
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SOMEMURA Yoh
NTT LSI Laboratories
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DEGUCHI Kimiyoshi
NTT LSI Laboratories
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Somemura Y
Ntt Lsi Laboratories
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Miyoshi K
Ulsi Device Development Laboratory Nec Corporation
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MIYOSHI Kazunori
NTT LSI Laboratories
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Deguchi K
Department Of Electronics And Information Systems Osaka University
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MATSUDA Tadahito
NTT LSI Laboratories
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Yoshikawa Akira
Ntt Lsi Laboratories
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Yoshikawa Akira
Ntt Lsi Laboratories:(present Address) Ntt. At Present Electronic Device Manufacturing Equipment &am
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UTSUGI Yasushi
NTT LSI Laboratories
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Utsugi Yasushi
Ntt Laboratories
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DEDUCHI Kimiyoshi
NTT LSI Laboratories
著作論文
- Characteristics of Ag-Se/Ge-Se as a Recording Medium for X-Ray Holograms
- Resolution Enhancement of Hole Patterns in Sychrotron Radiation Lithography
- Effects of Fresnel Diffraction on Resolution and Linewidth Control in Synchrotron Radiation Lithography
- Patterning Characteristics of 0.1-μm Line-and-Space Patternin Synchrotron Radiation Lithography
- Proximity Effect on Patterning Characteristics of Hole Patterns in Synchrotron Radiation Lithography