Okazaki S | Japan Broadcasting Corp. Tokyo Jpn

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概要

• OKAZAKI Shinjiの詳細を見る
• 同名の論文著者
• Japan Broadcasting Corp. Tokyo Jpnの論文著者

関連著者

• Okazaki S

  Japan Broadcasting Corp. Tokyo Jpn

• OKAZAKI Shinji

  ASET EUVL Laboratory

• Okazaki S

  Aset Euvl Laboratory

• OKAZAKI Shinji

  Central Research Laboratory, Hitacti, Ltd.

• Okazaki Shinji

  Central Research Lab. Hitachi Ltd.

• Terasawa T

  Hitachi Ltd. Tokyo Jpn

• Hasegawa Norio

  Department Of Urology Jikei University School Of Medicine

• TERASAWA Tsuneo

  Central Research Laboratory, Hitachi, Ltd.

• Hayashi Norihiro

  Department Of Urology Jikei University School Of Medicine

• Hasegawa N

  Hitachi Ltd. Tokyo Jpn

• Hasegawa N

  Univ. Tokyo Tokyo Jpn

• Hasegawa Norio

  Department Of Material Physics Faculty Of Engineering Science Osaka University

• Terasawa Tsuneo

  Central Research Laboratory Hitachi Ltd.

• YOSHIMURA Toshiyuki

  Central Research Laboratory, Hitachi, Ltd.

• Yoshimura T

  Kyushu Univ. Fukuoka Jpn

• Yoshimura Toshiyuki

  Central Research Laboratory Hitachi Ltd.

• Imai A

  Device Development Center Hitachi Ltd.

• Asai N

  Sony Corp. Yokohama Jpn

• UENO Tomo

  Faculty of Technology, Tokyo University of Agriculture and Technology

• Shiraishi H

  National Res. Inst. Metals

• Shiraishi Hiroshi

  Central Research Laboratory Hitachi Ltd.

• IMAI Akira

  Central Research Laboratory, Hitachi Ltd.

• UENO Takumi

  Central Research Laboratory, Hitachi Ltd.

• Ueno T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• ASAI Naoko

  Central Research Laboratory, Hitachi, Ltd.

• Imai Akira

  Central Research Laboratory Hitachi Ltd

• Shiraishi Hiroshi

  Central Research Lab. Hitachi Ltd.

• Shiraishi Hiroshi

  Central Research Laboratory Hitachi Ltd

• Ishii T

  Idemitsu Material Co. Ltd. Chiba Jpn

• Aoki M

  Hitachi Ltd. Tokyo Jpn

• Aoki Masaru

  Department Of Chemistry Graduate School Of Arts And Sciences The University Of Tokyo

• Aoki Masaaki

  Central Research Laboratory Hitachi Ltd.

• Aoki M

  Univ. Tokyo Tokyo Jpn

• KAWAMOTO Yoshifumi

  Central Research Laboratory, Hitachi, Ltd.

• NAKAYAMA Yoshinori

  Central Research Laboratory, Hitachi Ltd.

• Ishii T

  Kyoto Univ. Kyoto Jpn

• Ishii T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• MURAI Fumio

  Central Research Laboratory, Hitachi, Ltd

• Isozaki Tadaaki

  Central Research And Development Laboratory Showa Shell Sekiyu K. K.

• Nakayama Yoshinori

  Central Research Laboratory Hitachi Ltd

• Nakayama Yoshinori

  Central Research Laboratory Hitachi Lid.

• Nakagome Yoshinobu

  Semiconductor Amp Integrated Circuits Div Hitachi Ltd.

• Nakagome Yoshinobu

  Central Research Laboratory Hitachi Ltd.

• Nakagome Yoshinobu

  Central Research Laboratory

• Fukuda Hiroshi

  Central Research Laboratory Hitachi Ltd.

• Fukuda Hiroshi

  Central Research Labolatory Hitachi Ltd.

• Aoki Masaru

  Advanced Display Incorporated

• Fukuda H

  Hitachi Ltd. Kokubunji Jpn

• HASEGAWA Norio

  Central Research Laboratory, Hitachi, Ltd.

• Iga Toru

  R&d Center Idemitsu Material Co. Ltd.

• Sakama Isao

  Hitachi Vlsi Engineering

• Murai F

  Hitachi Ltd. Tokyo Jpn

• Murai Fumio

  Central Research Laboratory Hitachi Ltd

• Aoki M

  Ion Engineering Res. Inst. Corp. Osaka Jpn

• KAGA Toru

  Central Research Laboratory, Hitachi, Lid.

• ISHII Tatsuya

  Central Research Laboratory, Hitachi, Ltd.

• Kaga T

  Hitachi Ltd. Tokyo

• Nakayama Y

  Univ. Tokyo Tokyo Jpn

• OKAZAKI Sinji

  Central Research Laboratory, Hitachi Ltd

• Moniwa A

  Hitachi Ltd. Tokyo Jpn

• ISHII Takugo

  Institute fur Laser-Physik, University of Hamburg

• Nakagome Y

  Semiconductor Amp Integrated Circuits Div Hitachi Ltd.

• MONIWA Akemi

  Central Research Laboratory, Hitachi Ltd.

• OKAZAKI Shinji

  Semiconductor & Integrated Circuits Div., Hitachi Ltd.

• TANAKA Toshihiko

  Hitachi Limited, Central Research Laboratory

• UCHINO Shouichi

  Hitachi Limited, Central Research Laboratory

• HASEGAWA Norio

  Hitachi Limited, Central Research Laboratory

• OKAZAKI Shinji

  Hitachi Limited, Central Research Laboratory

• Ishii T

  Institut Fur Laser-physik Universtat Of Hamburg

• Hasegawa Norio

  Central Research Laboratory Hitachi Ltd.

• Moniwa Akemi

  Central Research Lab. Hitachi Ltd.

• Uchino S

  Central Research Lab. Hitachi Ltd.

• Kawamoto Y

  Kobe Univ. Kobe Jpn

• Kawamoto Yoshifumi

  Central Research Laboratory Hitachi Ltd.

• Yoshimura T

  Osaka Univ. Osaka Jpn

• KAGA Toru

  Central Research Laboratory, Hitachi Ltd

• Nakayama Yoshinori

  Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

• Murai Fumio

  Central Research Lab., Hitachi Ltd.

• Imai Akira

  Device Development Center Hitachi Ltd.

• Yamamoto J

  Process Equipment Engineering Div. Canon Sales Co. Inc.

• Satoh Hidetoshi

  Central Research Laboratory Hitachi Ltd.

• Gotoh Yasuko

  Central Research Laboratory Hitachi Ltd.

• FUKUDA Hiroshi

  Hitachi, Ltd., Central Research Laboratory

• TANAKA Toshihiko

  Central Research Laboratory, Hitachi, Ltd.

• YAMAMOTO Jiro

  Central Research Laboratory, Hitachi, Ltd.

• Fukuda Hiroshi

  Hitachi Limited Central Research Laboratory

• Fukuda Hiroshi

  Hitachi Central Research Laboratory

• Yamamoto Jiro

  Central Research Laboratory Hitachi Ltd.

• Hasegawa Norio

  Device Development Center Hitachi Ltd.

• TORIUMI Minoru

  Central Research Laboratory, Hitachi, Ltd.

• Toriumi M

  Daikin Ind. Ltd. Osaka Jpn

• Toriumi Minoru

  Central Research Laboratory Hitachi Ltd.

• Hashimoto Michiaki

  Hitachi Limited Central Research Laboratory

• NAKAJO Kyoji

  Hitachi ULSI Engineering Corp.

• HASEGAWA Norio

  Semiconductor Development Center, Semiconductor & Integrated Circuits Div., Hitachi Ltd.

• IMAI Akira

  Semiconductor Development Center, Semiconductor & Integrated Circuits Div., Hitachi Ltd.

• YAMANAKA Toshiaki

  Hitachi Limited, Central Research Laboratory

• TERASAWA Tsuneo

  Hitachi Limited, Central Research Laboratory

• Yamamoto J

  Central Research Lab. Hitachi Ltd.

• ASAI Naoko

  Device Development Center, Hitachi, Ltd.

• HAYANO Katsuya

  Device Development Center, Hitachi, Ltd.

• OKAZAKI Shinji

  Device Development Center, Hitachi, Ltd.

• Hayano Katsuya

  Device Development Center Hitachi Ltd.

• Sakemi Jun'ya

  Hitachi Ulsi Engineering Corp.

• Yamanaka Toshiaki

  Hitachi Limited Central Research Laboratory

• Tanaka Toshihiko

  Central Research Laboratory, Hitachi Ltd.

• Gotoh Yasuko

  Central Research Laboratory, Hitachi, Ltd.

• Yamamoto Jiro

  Central Research Lab., Hitachi Ltd.

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著作論文

• Correlation of Nano Edge Roughness in Resist Patterns with Base Polymers
• Optical Performance of KrF Excimer Laser Lithography with Phase Shift Mask for Fabrication of 0.15 μm and Below
• Novel Process for Direct Delineation of Spin on Glass (SOG)
• Nanofabrication with Langmuir-Blodgett Films of a Chemical Amplification Resist SAL601
• Formation of Fractionated Novolak Resin Langmuir-Blodgett Films
• Fabrication of 0.1μm Complementary Metal-Oxide-Semiconductor Devices : Micro/nanofabrication and Devices
• Fabrication of 0.1μm Complementary Metal-Oxide-Semiconductor Devices
• Electron Beam Direct Writing Technology for 64-Mb DRAM LSIs : Lithography Technology
• Electron Beam Direct Writing Technology for 64-Mb DRAM LSIs
• Heuristic Method for Phase-Conflict Minimization in Automatic Phase-Shift Mask Design
• Analysis of Nonplanar Topography Effects of Phase Shift Masks on Imaging Characteristics
• 0.13 μm Pattern Delineation Using KrF Excimer Laser Light
• Algorithm for Phase-Shift Mask Design with Priority on Shifter Placement
• Phase-Shifting Technology for ULSI Patterning (Special Issue on Opto-Electronics and LSI)
• A Novel Optical Lithography Technique Using the Phase-Shifter Fringe
• Proposal for the Coma Aberration Dependent Overlay Error Compensation Technology
• Sub-Halfmicron Lithography Using a High-Contrast i-Line CEL

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