Ino Kazuhide | Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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概要
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- 同名の論文著者
- Department Of Electronic Engineering Faculty Of Engineering Tohoku Universityの論文著者
関連著者
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Ohmi Tadahiro
Department Of Electronic Engineering
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Ino Kazuhide
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Ohmi Tadahiro
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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INO Kazuhide
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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TANIGUCHI Yoshiyuki
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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Taniguchi Yoshiyuki
Department of Chemistry, Kyushu University 33
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大見 忠弘
東北大学未来科学技術共同研究センター
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Taniguchi Yoshio
Department Of Functional Polymer Science Faculty Of Textile Science And Technology Shinshu Universit
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Taniguchi Yoshio
Advanced Research Laboratory Hitachi Ltd.
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Ino Kazuhide
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory For
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ICHIKAWA Akihiro
Departments of Nuclear Medicine, Gunma University School of Medicine
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Ichikawa Akihiro
Department Of Electronic Engineering Tohoku University:laboratory For Microelectrontics Research Ins
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Ohmi Tadahiro
Department Of Electronic Engineering Tohoku University:laboratory For Microelectrontics Research Ins
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Ino Kazuhide
Department Of Electronic Engineering Tohoku University:laboratory For Microelectrontics Research Ins
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Kumami Hajime
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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NATORI Iwao
Department of Electronic Engineering, Tohoku University
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Shindo Wataru
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Natori Iwao
Department Of Electronic Engineering Tohoku University:laboratory For Microelectrontics Research Ins
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Ohmi Tadahiro
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University,
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Ino Kazuhide
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University,
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Kumami Hajime
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University,
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Shindo Wataru
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University,
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Ohmi Tadahiro
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Ino Kazuhide
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
著作論文
- Formation of Ultra-Shallow and Low-Reverse-Bias-Current Tantalum-Silicided Junctions Using a Si-Eneapsulated Silicidation Technique and Low-Temperature Furnace Annealing below 550℃
- Formation of Ultra-Shallow, Low-Leakage and Low-Contact-Resistance Junctions by Low-Temperature Si-Encapsulated Silicidation Process
- In Situ Chamber Cleaning Using Halogenated-Gas Plasmas Evaluated by Plasma-Parameter Extraction
- Modeling and Analysis of RF Plasma Using Electrical Equivalent Circuit
- Enhancement of Silicon Epitaxy by Increased Phosphorus Concentration in a Low-Energy Ion Bombardment Process
- Formation of Ultra-Shallow and Low-Reverse-Bias-Current Tantalum-Silicided Junctions Using a Si-Encapsulated Silicidation Technique and Low-Temperature Furnace Annealing below 550°C