Hirose Ryo | The Institute Of Scientific And Industrial Research Osaka University
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概要
関連著者
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Tagawa Seiichi
The Institute Of Scientific And Industrial Research
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KAI Toshiyuki
JSR Corp.
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SHIMOKAWA Tsutomu
JSR Corp.
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Hirose Ryo
The Institute Of Scientific And Industrial Research Osaka University
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research (ISIR), Osaka University
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TAGAWA Seiichi
The Institute of Scientific and Industrial Research, Osaka University
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関 修平
大阪大学産業科学研究所
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research, Osaka University
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Tagawa S
The Inst. Of Scientific And Industrial Res. Osaka Univ.
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Kozawa Takahiro
The Institute Of Scientific And Industrial Research Osaka University
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HIROSE Ryo
The Institute of Scientific and Industrial Research, Osaka University
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Tagawa S
Osaka Univ. Osaka Jpn
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Kai Toshiyuki
Jsr Corp. Mie Jpn
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古沢 孝弘
Osaka University
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Shimizu Daisuke
JSR Corp., 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japan
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Hirose Ryo
The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
著作論文
- Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation
- Difference between Acid Generation Mechanisms in Poly(hydroxystyrene)- and Polyacrylate-Based Chemically Amplified Resists upon Exposure to Extreme Ultraviolet Radiation
- Dependence of Absorption Coefficient and Acid Generation Efficiency on Acid Generator Concentration in Chemically Amplified Resist for Extreme Ultraviolet Lithography