TANAKA Satoko | Semiconductor Group, Toshiba Corp.

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概要

• 同名の論文著者
• Semiconductor Group, Toshiba Corp.の論文著者

関連著者

• Saito Tomohiro

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.

• Miyano K

  Toshiba Corp. Yokohama Jpn

• NAKAJIMA Kazuaki

  Microelectronics Engineering Labs., Toshiba Corporation

• SUGURO Kyoichi

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• AKASAKA Yasushi

  Microelectronics Engineering Laboratory, Toshiba Corp.

• MIYANO Kiyotaka

  Microelectronics Engineering Laboratory, Toshiba Corp.

• TAKAHASHI Mamoru

  Research and Development Center, Toshiba Corp.

• TANAKA Satoko

  Semiconductor Group, Toshiba Corp.

• Nakajima Kensuke

  Research Institute Of Electrical Communication Tohoku University

• Saito T

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.

• Suguro K

  Toshiba Corporation Semiconductor Company

• Yagishita A

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation

• Akasaka Yasushi

  Microelectronics Engineering Laboratory Toshiba Corporation

• Miyano Kiyotaka

  Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation

• Nakajima Kazuaki

  Microelectronics Engineering Labs. Toshiba Corporation

• Saito T

  School Of Engineering Nagoya University

• Takahashi Mamoru

  Research And Development Center Toshiba Corp.

• Suguro Kyoichi

  Toshiba Corporation Semiconductor Company

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著作論文

• Highly Uniform Low-Pressure Chemical Vapor Deposition (LP-CVD) of Si_3N_4 Film on Tungsten for Advanced Low-Resistivity "Polymetal" Gate Interconnects

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