Homogeneous Al

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概要

• 論文の詳細を見る

• Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al<inf>2</inf>O<inf>3</inf>with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al<inf>2</inf>O<inf>3</inf>layers of the same thickness. The water vapor transmission rate was increased up to the order of 10^{-4} g\cdotm^-2\cdotd^-1from a three-pair system of reactive and nonreactive sputtered Al<inf>2</inf>O<inf>3</inf>bilayers.

• 2013-12-25

著者

• Bae Kang

  Department Of Transport Vehicle Engineering Gyeongsang National University

• Sohn Sunyoung

  Department of Electronics Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea

• Seo Sung-Bo

  Department of Electronics Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea

• Kim Hwa-Min

  Department of Advanced Energy Material Science and Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea

• Kim Dongyoung

  Department of Electronics Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea

• Bae Kang

  Department of Electronics Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea

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• Homogeneous Al

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