Electrical and Optical Properties of In2O3–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering
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概要
- 論文の詳細を見る
Using a In2O3 and ZnO powder mixture with a ratio of $95:5$ in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In2O3–ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity.
- 2003-01-15
著者
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Kim Hwa-min
Department Of Electronics Engineering Catholic University Of Daegu
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Jung Sang-kuan
Department Of Physics And Semiconductor Science Catholic University Of Daegu
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Ahn Jeung-sun
The School Of Materials Science Japan Advanced Institute Of Science And Technology
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Je Koo-chul
The School Of Materials Science Japan Advanced Institute Of Science And Technology (jaist)
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Kang Young-jin
The School Of Materials Science Japan Advanced Institute Of Science And Technology
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Kang Young-Jin
The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai 1-1, Tatsunokuchi, Ishikawa 923-1292, Japan
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Je Koo-Chul
The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai 1-1, Tatsunokuchi, Ishikawa 923-1292, Japan
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Ahn Jeung-Sun
The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai 1-1, Tatsunokuchi, Ishikawa 923-1292, Japan
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Jung Sang-Kuan
Department of Physics and Semiconductor Science, Catholic University of Daegu, Hayang, Kyeongbuk 712-702, Korea
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Kim Hwa-Min
Department of Advanced Energy Material Science and Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Republic of Korea
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