High-Current Reliability and Growth Conditions of Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon
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概要
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We fabricated multilayer graphene directly on SiO<inf>2</inf>by annealing of sputtered amorphous carbon under a catalyst layer without complicated transfer processes, and investigated the effects of the catalysts and the annealing ambient gases on obtaining large-grain, multilayer graphene. As a result, it was found that annealing conditions with a Co catalyst layer in a nitrogen gas atmosphere are important for increasing the ratio of oriented graphene sheets, corresponding to a lower resistivity of the film. Furthermore, it was confirmed that the multilayer graphene wire obtained by optimizing the growth conditions can sustain a high current density of 10^{7} A/cm<sup>2</sup>, that is, the lifetime of the multilayer graphene wire is over two orders of magnitude longer than that of a Cu wire with the same current density; this current density is over one order of magnitude higher than the current density that can be carried by a Cu wire for the same lifetime.
- 2013-04-25
著者
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Muro Takayuki
Japan Synchrotron Radiation Res. Inst. Hyogo Jpn
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Takakuwa Yuji
Tohoku Univ. Sendai Jpn
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Sato Shintaro
Collaborative Research Team Green Nanoelectronics Center (gnc)
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Yokoyama Naoki
Collaborative Institute for Nano Quantum Information Electronics, The University of Tokyo, 4-6-1 Komaba, Meguro, Tokyo 153-8505, Japan
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Takakuwa Yuji
Tohoku University, Sendai 980-8577, Japan
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Sato Motonobu
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Takahashi Makoto
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Nakano Haruhisa
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Nihei Mizuhisa
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Sato Shintaro
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Nihei Mizuhisa
Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Sato Motonobu
Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Takahashi Makoto
Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Nakano Haruhisa
Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Yokoyama Naoki
Collaborative Research Team Green Nanoelectronics Center (GNC)/National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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