Long Length, High-Density Carbon Nanotube Film Grown by Slope Control of Temperature Profile for Applications in Heat Dissipation

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概要

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• We have developed a new growth method for a film of dense, vertically aligned carbon nanotubes (CNTs). We varied the slope of the growth temperature profile between 450 and 800 °C. By using the method with an Fe/Ti catalyst, the filling factor of the CNT film was measured to be 0.28, which is 20 times denser than that in the case where conventional CVD growth is utilized. We name this growth method the slope control of temperature profile (STEP) growth. Another feature of CNT films obtained by STEP growth is their mirror like surfaces. This allows for the measurement of the thermal conductivity by a pulse optical heating thermoreflectance method. The maximum thermal conductivity of the STEP-grown CNT film was 260 W m^-1K^-1, which is higher than those of a solder and Si. This result suggests that STEP-grown CNT films are effective heat dissipation materials and can be used as thermal interface material (TIM) and thermal through silicon via (TSV).

• 2013-11-25

著者

• Yokoyama Naoki

  Collaborative Institute for Nano Quantum Information Electronics, The University of Tokyo, 4-6-1 Komaba, Meguro, Tokyo 153-8505, Japan

• Nihei Mizuhisa

  Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan

• Murakami Tomo

  Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan

• Kawabata Akio

  Collaborative Research Team Green Nanoelectronics Center (GNC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan

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