High-Sensitivity Fiber-Optic Fabry--Perot Interferometer Temperature Sensor
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概要
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A novel structure of a fiber-optic Fabry--Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional single-mode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry--Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1 h.
- 2012-06-25
著者
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Ueda Toshitsugu
Graduate School Of Information Production And Systems Waseda Univ.
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Li Xuefeng
Graduate School Of Information Production And Systems Waseda University
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Liang Jinxing
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
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Lin Shuo
Graduate School of Information, Production and Systems, Waseda University, Kitakyushu 808-0135, Japan
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Oigawa Hiroshi
Graduate School of Information, Production and Systems, Waseda University, Kitakyushu 808-0135, Japan
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Li Xuefeng
Graduate School of Information, Production and Systems, Waseda University, Kitakyushu 808-0135, Japan
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Ueda Toshitsugu
Graduate School of Information, Production and Systems, Waseda University, Kitakyushu 808-0135, Japan
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Liang Jinxing
School of Instrument Science and Engineering, Southeast University
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