Damping Characteristics of Quartz Tilt Sensor with Nonparallel Comb Electrode
スポンサーリンク
概要
- 論文の詳細を見る
The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.
著者
-
Ueda Toshitsugu
Graduate School Of Information Production And Systems Waseda Univ.
-
Kohsaka Fusao
Graduate School Of Information Production And Systems Waseda University
-
Liang Jinxing
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
-
Ueda Toshitsugu
Graduate School of Information Production and Systems, Waseda University
関連論文
- Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy
- Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques
- Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy
- Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor
- Particle Element and Size Simultaneous Measurement Using LIBS
- Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System
- Photonic Bandgap Fiber for a Sensing Device
- Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques
- Fabrication of Two-Axis Quartz MEMS-Based Capacitive Tilt Sensor
- Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications
- In-situ Measurement for Gas Concentrations using Tunable Lasers
- Deblur of Radially Variant Blurred Image for Single Lens System
- Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor
- Thermomechanical Fatigue Performance of Lead-Free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (Special Issue : Advanced Metallization for ULSI Applications)
- Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling (Special Issue : Solid State Devices and Materials (2))
- Development of Carbonaceous Particle Size Analyzer Using Laser-induced Incandescence Technology
- Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections
- Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization
- High-Sensitivity Fiber-Optic Fabry--Perot Interferometer Temperature Sensor
- Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting
- Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror
- Damping Characteristics of Quartz Tilt Sensor with Nonparallel Comb Electrode