Lamé-Mode Octagonal Microelectromechanical System Resonator Utilizing Slanting Shape of Sliding Driving Electrodes

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概要

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• For high-resonant-frequency microelectromechanical system (MEMS) resonators, the reduction of the gap between the driving electrode (DE) and the resonant plate is very important, because the electromechanical coupling coefficient greatly increases to compensate for the output signal decrease. In this paper, we describe a new technique for forming a submicron narrowed gap by sliding a DE with a slanting shape. The slant gap helps to avoid the pattern size dependence in the fabrication, because each gap length is the same. By adapting the sliding DE, a Lamé-mode octagonal MEMS resonator was investigated. The fabricated resonator has the Lamé-mode resonance at 12.48 MHz. After narrowing the gap, the mechanical displacement amplitude was directly measured using a laser-Doppler vibrometer. The results show that the narrowed gap yields a great improvement (92 times) in the amplitude, compared with that before narrowing the gap. A large decrease in the absolute impedance and a large phase transition around the resonant frequency have also been observed. The influence of the experimentally obtained gap length asymmetry on the degradation of the resonators is also discussed.

• 2012-06-25

著者

• Suzuki Kenichiro

  College Of Science And Engineering Ritsumeikan University

• TANIGAWA Hiroshi

  Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology

• Okamoto Tadashi

  College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

• Okamoto Tadashi

  College of Liberal Arts and Science, Okayama University

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