Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning
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概要
- 論文の詳細を見る
- 2010-03-01
著者
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Suzuki Kenichiro
College Of Science And Engineering Ritsumeikan University
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TANIGAWA Hiroshi
Research Organization of Science and Engineering, Ritsumeikan University
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MAKITA Sho
College of Science and Engineering, Ritsumeikan University
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Makita Sho
College Of Science And Engineering Ritsumeikan University
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Tanigawa Hiroshi
Research Organization Of Science And Engineering Ritsumeikan University
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TANIGAWA Hiroshi
Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology
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SUZUKI Kenichiro
College of Science and Engineering, Ritsumeikan University
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