Two-Stage-Driven Cantilever-Based RF Micro-Electro-Mechanical System Microswitch
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概要
- 論文の詳細を見る
We have designed two types of cantilever micro-electro-mechanical system (MEMS) switch based on two-stage driving. These microswitches can mitigate the tip-first-touching of the contact part and are expected to have a long lifetime. Moreover, their driving voltage is low while maintaining device miniaturization. Their RF characteristics of insertion loss and isolation are calculated and shown to be excellent. The microswitches are fabricated by silicon deep dry etching using a silicon-on-insulator (SOI) wafer and then electrostatically bonded onto a glass substrate. This process is fairly simple and confirmed to enable the precise fabrication of two electrode gaps.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-30
著者
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Suzuki Kenichiro
College Of Science And Engineering Ritsumeikan University
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Tauchi Hironori
College Of Science And Engineering Ritsumeikan University
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Tauchi Hironori
College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan
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