Design and Fabrication of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch
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概要
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We have designed two kinds of cantilever MEMS switches based on two-stage driving. These micro-switches can mitigate tip-first-touching of the contact part and expected to have a long lifetime. Moreover, the driving voltage is low while keeping the device miniaturization. The RF characteristics of insertion loss and isolation are calculated and shown to be excellent. The micro-switches are fabricated by silicon deep dry etching using an SOI wafer and then electrostatic bonding onto a glass substrate. This process is fairly simple and confirmed to be able to fabricate two electrode gaps precisely.
- 社団法人 電気学会の論文
- 2006-07-01
著者
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Suzuki Kenichiro
College Of Science And Engineering Ritsumeikan University
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TAUCHI Hironori
College of Science and Engineering, Ritsumeikan University
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Tauchi Hironori
College Of Science And Engineering Ritsumeikan University
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