Laterally-Driven Silicon RF Micro-Switch with High Isolation
スポンサーリンク
概要
- 論文の詳細を見る
Few researches have been so far investigated in applying lateral motional micro electro mechanical system (MEMS) structure to a micro-switch. In this paper we report on the design and fabrication of a laterally-driven silicon RF micro-switch, which is based on a capacitive-type series switch. The isolation is greatly improved by using lateral motion in mutually opposite directions. In addition, this lateral movement is effective to alleviate the adhesion of a contact area. The cooperation of electrostatic lateral force with a spring force increases the release force by 28%. The fabricated switch is expected to have the isolation of $-47.6$ dB at 2 GHz and the insertion loss of less than 0.2 dB. The silicon RF transmission line proposed here helps the process very easy because of keeping the overall structure simple.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-30
著者
-
Suzuki Kenichiro
College Of Science And Engineering Ritsumeikan University
-
Kamide Sho
College Of Science And Engineering Ritsumeikan University
-
Suzuki Kenichiro
College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan
-
Kamide Sho
College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan
関連論文
- Characterization of Four-Points-Pinned Ring-Shaped Silicon Microelectromechanical Systems Resonator
- Design and Fabrication of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch
- Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning
- Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon Beam Resonator
- Design and Fabrication of a Laterally-Driven Silicon RF Micro-Switch with High Isolation (特集 次世代自動車センシングシステム)
- High Quality Factor 80 MHz Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
- Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
- Silicon Beam Microelectromechanical Systems Resonator with a Sliding Electrode
- Lamé-Mode Octagonal Microelectromechanical System Resonator Utilizing Slanting Shape of Sliding Driving Electrodes
- Two-Stage-Driven Cantilever-Based RF Micro-Electro-Mechanical System Microswitch
- Silicon Beam Resonator Utilizing the Third-Order Bending Mode
- Variable Resonance Frequency Selection for Fishbone-Shaped Microelectromechanical System Resonator Based on Multi-Physics Simulation
- Laterally-Driven Silicon RF Micro-Switch with High Isolation