Fabrication of 100-Oriented (Na0.5K0.5)NbO3--BaZrO3--(Bi0.5Li0.5)TiO3 Films on Si Substrate Using LaNiO3 Layer

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概要

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• 0.92(Na0.5K0.5)NbO3--0.06BaZrO3--0.02(Bi0.5Li0.5)TiO3 (NKN--BZ--BLT) thin films were fabricated by pulsed laser deposition (PLD) on a (100)Si substrate on which a 100-oriented LaNiO3 (LNO) bottom layer was fabricated by the chemical solution deposition method. The NKN--BZ--BLT films were characterized by X-ray diffraction (XRD) analysis, \theta/2\theta scan and \psi--2\theta/\omega scan, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). The properties were compared with those of the NKN--BZ--BLT film deposited on the (111)Pt/Ti/SiO2/(100)Si substrate. We demonstrated that the LNO layer plays an important role in obtaining 100-oriented NKN--BZ--BLT films on the Si substrate. SEM surface and cross-sectional images showed that the NKN--BZ--BLT films fabricated at a substrate temperature of 800 °C had a high density and a relatively smooth surface. From the TEM image, this NKN--BZ--BLT film fabricated at 800 °C was composed of the columnar grains and some vertical-long pores could be observed. The energy dispersive X-ray (EDX) analysis showed that the LNO layer is decomposed to La2NiO4 by its reaction with Nb. The dielectric properties showed that the NKN--BZ--BLT film on the LNO electrode had a small dielectric constant of 82, compared with the NKN--BZ--BLT film (\varepsilon_{\text{r}} = 3127) on the (111)Pt/Ti/SiO2/(100)Si substrate. This difference is due to the polarization direction of the film and the polarization axis of the NKN--BZ--BLT film on the LNO electrode exists in a direction perpendicular to the surface of the substrate. However, the NKN--BZ--BLT film on LNO showed a small P_{\text{r}} value. This is due to the dispersion of Ni from the LNO layer.

• 2012-09-25

著者

• Yamazoe Seiji

  Department Of Materials Chemistry Ryukoku University

• Adachi Hideaki

  Advanced Technology Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Wada Takahiro

  Department Of Intelligent Mechanical Systems Faculty Of Engineering Kagawa University

• Yamazoe Seiji

  Department of Materials Chemistry, Ryukoku University, Otsu 520-2194, Japan

• Fukada Masaki

  Department of Materials Chemistry, Ryukoku University, Otsu 520-2194, Japan

• Komaki Kazuki

  Panasonic Corporation Industrial Devices Company, Kadoma, Osaka 571-8686, Japan

• Nakao Tomohiro

  Department of Materials Chemistry, Ryukoku University, Otsu 520-2194, Japan

• Noda Toshinari

  Panasonic Corporation Industrial Devices Company, Kadoma, Osaka 571-8686, Japan

• Adachi Hideaki

  Advanced Technology Research Laboratories, Panasonic Corporation, Seika, Kyoto 619-0237, Japan

• Wada Takahiro

  Department of Chemistry, Tokyo Metropolitan University

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