Development of Pt/MgO(100) Buffer Layers for Orientation Control of Perovskite Oxide Thin Films
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概要
- 論文の詳細を見る
(100)-oriented MgO thin films can be effectively grown at a substrate temperature of room temperature (RT) on Fe seed layers by the facing-targets sputtering (FTS) method. Pt(100) orientation was observed when the Pt layer was deposited on MgO(100)/Fe buffer layers at a substrate temperature above 350 °C. Pt thin films can be grown effectively with (100) orientation and with smaller strain when they are prepared at a substrate temperature above 500 °C. Also, Ba1-xSrxTiO3 (BST) thin films with (100) preferential orientation can be grown on Pt(100)/MgO(100)/Fe buffer layers when Pt and BST films are deposited at a substrate temperature of 500 °C. Pt(100)/MgO(100)/Fe buffer layers are very effective for attaining BST(100) orientation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-09-25
著者
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Nakagawa Shigeki
Department Of Biochemistry Nihon University School Of Medicine
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Matsumoto Tatsuro
Department Of Animal Husbandry Faculty Of Agriculture Tohoku University
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Tamai Kazuhiro
Department Of Biology Faculty Of Science Toyama University
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Matsumoto Tatsuro
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Murashima Yuuji
Panasonic Electronic Devices Japan Co., Ltd., 1006 Kadoma, Kadoma, Osaka 571-8506, Japan
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Komaki Kazuki
Panasonic Electronic Devices Japan Co., Ltd., 1006 Kadoma, Kadoma, Osaka 571-8506, Japan
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Tamai Kazuhiro
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Komaki Kazuki
Panasonic Corporation Industrial Devices Company, Kadoma, Osaka 571-8686, Japan
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Nakagawa Shigeki
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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