SiN_x Double Layer Antireflection Coating by Plasma-Enhanced Chemical Vapor Deposition for Single Crystalline Silicon Solar Cells

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概要

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• Double layer antireflection (DLAR) coatings have significant advantages over single-layer antireflection (SLAR) coatings owing to their coverage of a broad solar spectral range. In this study, the properties of SiN_x are examined. DLAR coatings using two thin films of SiN_x with different refractive indices are presented. Using the same materials is more cost-effective than using different materials. The total thickness of SiN_x/SiN_x films is kept at 80 nm. The top SiN_x film has a refractive index of 1.9, while the bottom layer has a refractive index of 2.3. Single crystalline solar cells are fabricated with different thicknesses for the top and bottom layers. The solar cell with 60 nm/20 nm SiN_x DLAR coatings has 18.3% efficiency, while that with 80 nm SiN_x SLAR coating has 17.6% efficiency. The improvement of efficiency is due to the effect of better passivation and better antireflection of DLAR.

• 2011-08-25

著者

• Yi Junsin

  School Of Electrical And Computer Engineering Sungkyunkwan University

• Choi Byoungdeog

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea

• Lee Youn-Jung

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Gong Daeyeong

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Ju Minkyu

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Ko Jisoo

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Yang Doohwan

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Lee Yongwoo

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Choi Gyuho

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

• Kim Sin

  Innovation Silicon Co., Ltd., Yeongam, Jeollanam 526-891, Republic of Korea

• Yoo Jinsu

  Korea Institute of Energy Research, Daejeon 305-343, Republic of Korea

• Choi Byoungdeog

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic of Korea

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