Selective Epitaxial Growth of Silicon for Vertical Diode Application
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概要
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Selectivity control in silicon selective epitaxial growth (SEG) for deep contact patterns, which is one of the key processes for silicon-based stacked devices and cell switches for next generation memories, was studied. Absolute values of selectivity loss during silicon SEG using the most popular H2/dichlorosilane (DCS)/HCl gas system were evaluated using a commercialized inspection tool in 200 mm wafers with real contact patterns. It was revealed that $\text{HCl}/(\text{DCS}+\text{HCl})$ ratio and the contact structure played a crucial role in suppressing selectivity loss. The number of selectivity losses in an entire wafer was less than 100 when the $\text{HCl}/(\text{DCS}+\text{HCl})$ ratio was larger than 0.41. The vertical pn diode prepared using the silicon SEG process with elaborate selectivity control showed more remarkable electrical abilities to accommodate current flow than polycrystalline silicon (poly-Si), including the ideality factor and swing, and reverse leakage current.
- 2010-08-25
著者
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Kang Chang-Jin
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Moon Joo-Tae
Samsung Electronics, Semiconductor R&D Center, San 16 Banwol-dong, Hwasung, Kyunggi-do 445-701, Republic of Korea
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Hyung Yong-Woo
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Lee Kong-Soo
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Yoo Dae-Han
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Han Jae-Jong
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Kim Seok-Sik
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Jeong Hong-Sik
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Park Hyunho
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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Jeong Hanwook
School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea
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Kim Kwang-Ryul
School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea
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Choi Byoungdeog
School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea
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Park Hyunho
Samsung Electronics Co., Ltd., Hwasung, Kyounggi-do 446-711, Korea
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Lee Kong-soo
Samsung Electronics Co., Ltd., Hwasung, Kyounggi-do 446-711, Korea
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Moon Joo-Tae
Samsung Electronics Co., Ltd., Yongin, Kyounggi-do 446-711, Korea
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