Integrated Bio-Imaging Sensor Array with Complementary Metal–Oxide–Semiconductor Cascode Source–Drain Follower
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概要
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A new bio-imaging sensor with photosystem I (PSI) of Thermosynechococcus elongatus and complementary metal–oxide–semiconductor (CMOS) circuits is demonstrated. Photons are converted into electrons by PSI, and electrons are detected as an electric signal by a CMOS integrated circuit. For a sensor circuit, a $4 \times 4$ sensor array with a CMOS source–drain follower is designed and fabricated by a standard CMOS process. An extended-gate electrode and an SU-8 passivation layer are formed on a CMOS chip by a post-CMOS process, and PSI is electrostatically fixed on the electrode. A $3\times 4$ image of the pattern of light illuminated on a chip is taken with the sensor array, where four cells are used as reference cells.
- 2010-04-25
著者
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Matsumoto Hirokazu
Department Of Electrical Engineering Faculty Of Engineering Fukuoka University
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Ozawa Hiroaki
Department Of Applied Chemistry Graduate School Of Engineering Kyushu University
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Tsukada Junichi
Department of Electrical and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Junichi Tsukada
Department of Electrical and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Hiroaki Ozawa
Department of Electrical and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Nao Terasaki
National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
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Shigeyasu Uno
Department of Electrical and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Kazuo Nakazato
Department of Electrical and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Noritaka Yamamoto
National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
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Takashi Hiraga
National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
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Masako Iwai
Department of Applied Biological Science, Faculty of Science and Technology, The Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Masae Konno
Department of Applied Biological Science, Faculty of Science and Technology, The Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Kohsuke Ito
Department of Applied Biological Science, Faculty of Science and Technology, The Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Yasunori Inoue
Department of Applied Biological Science, Faculty of Science and Technology, The Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Matsumoto Hirokazu
Department of Earth and Space Science, Graduate School of Science, Osaka University
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