Dynamic Contact Angle of Spreading Thin Film on a Rotating Disk
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概要
- 論文の詳細を見る
The effect of dynamic contact angle on fingering instability during spin coating is investigated by flow visualization experiment. A modified rotational Bond number, which demonstrates the dynamic contact angle of fluid front that affects the dimensionless critical radius, is proposed in this work. For high rotational Bond number, the variation in dimensionless critical radius is not linearly proportional to the rotational Reynolds number because of the variation in critical contact angle if the relaxation time is fixed at zero. By modifying the rotational Bond number with the change in critical contact angle, the dimensionless critical radius becomes a function of the modified rotational Bond number.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-12-25
著者
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Chou Fu-chu
Department Of Mechanical Engineering National Central University
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Chou Fu-Chu
Department of Mechanical Engineering, National Central University, Jhongli 320, Taiwan
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Lai Cheng-Chang
Department of Mechanical Engineering, National Central University, Jhongli 320, Taiwan
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Zen Tain-Shi
Department of Mechanical Engineering, National Central University, Jhongli 320, Taiwan
関連論文
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- Flow Simulation for Chemical Mechanical Planarization
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Suppression of Limit Cycles in Servo Systems Using Gain Limit Compensator
- Reduction of Amount of Dye during Spin Coating
- Visualization of the Effect of Liquid Dispensing Method during Spin Coating
- Cooling of Microspot by Microdroplets
- Effect of Relaxation Time on Spin Coating Instability
- Dynamic Contact Angle of Spreading Thin Film on a Rotating Disk
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Effect of Wind Shear on the Film Thickness Distribution over Rotating Doughnut Disks
- Cooling of Microspot by Microdroplets