Analytical Solutions of Film Planarization during Spin Coating
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-08-15
著者
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Wu Pei-ying
Department Of Mechanical Engineering National Central University
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CHOU Fu-Chu
Department of Mechanical Engineering, National Central University
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GONG Shih-Chin
Department of Mechanical Engineering, National Central University
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Chou F‐c
National Central Univ. Jhong‐li Twn
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Chou Fu-chu
Department Of Mechanical Engineering National Central University
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Gong Shih-chin
Department Of Mechanical Engineering National Central University
関連論文
- Analytical Solutions of Film Planarization during Spin Coating
- Flow Simulation for Chemical Mechanical Planarization
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Suppression of Limit Cycles in Servo Systems Using Gain Limit Compensator
- Reduction of Amount of Dye during Spin Coating
- Visualization of the Effect of Liquid Dispensing Method during Spin Coating
- Cooling of Microspot by Microdroplets
- Effect of Relaxation Time on Spin Coating Instability
- Dynamic Contact Angle of Spreading Thin Film on a Rotating Disk
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Effect of Wind Shear on the Film Thickness Distribution over Rotating Doughnut Disks
- Cooling of Microspot by Microdroplets