Effect of Wind Shear on the Film Thickness Distribution over Rotating Doughnut Disks
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概要
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Spin coating has been extensively investigated. However, a numerical study of the wind shear effect on film thickness distributions over doughnut disks has not yet been performed. Also, the effect of a hub on the air shear flow over a rotating doughnut disk has not yet been addressed. In this study, we predict successive liquid surface contours on rotating doughnut disks. The results are compared with experimental data, and discrepancies between them are identified. We found that the discrepancies are caused mainly by the presence of a hub, and that the wind shear effect cannot be simply analyzed in terms of Cochran's solution.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-01-15
著者
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Chou Fu-chu
Department Of Mechanical Engineering National Central University
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Gong Shih-chin
Department Of Mechanical Engineering National Central University
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Gong Shih-Chin
Department of Mechanical Engineering, National Central University, Chungli, Taiwan, 32054, Republic of China
関連論文
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- Flow Simulation for Chemical Mechanical Planarization
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Suppression of Limit Cycles in Servo Systems Using Gain Limit Compensator
- Reduction of Amount of Dye during Spin Coating
- Visualization of the Effect of Liquid Dispensing Method during Spin Coating
- Cooling of Microspot by Microdroplets
- Effect of Relaxation Time on Spin Coating Instability
- Dynamic Contact Angle of Spreading Thin Film on a Rotating Disk
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Effect of Wind Shear on the Film Thickness Distribution over Rotating Doughnut Disks
- Cooling of Microspot by Microdroplets