Cooling of Microspot by Microdroplets

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概要

• 論文の詳細を見る

• In this work, we explored a novel technique using microdroplets to cool hot microspots in advanced microelectronic devices. A hot floating membrane $150\,\micron \times 150\,\micron$ is used both as a hot microspot and a thermal microsensor in the experiment. Microdroplet of pure water is ejected from the inkjet head onto the hot microspot. The evaporation time of a microdroplet decreased with increasing microspot temperature, and the temperature decrease due to microdroplet cooling increased with increasing microspot temperature. The microspot temperature can be maintained constant without flooding with cooling liquid when microdroplets are ejected continuously at an optimal frequency.

• 公益社団法人 応用物理学会の論文
• 2004-08-15

著者

• Chou Fu-chu

  Department Of Mechanical Engineering National Central University

• Gong Shih-chin

  Intelligent Sensor Systems Division Asia Pacific Microsystems Inc.

• Wang Ming-wen

  Department Of Mechanical Engineering Oriental Institute Of Technology

• Chang Chi-yuan

  Department Of Electrical Engineering National Central University

• Chung Cheng-Ru

  Department of Mechanical Engineering, National Central University, Jhong-Li 320, Taiwan

• Chang Chi-Yuan

  Department of Mechanical Engineering, National Central University, Jhong-Li 320, Taiwan

• Gong Shih-Chin

  Intelligent Sensor Systems Division, Asia Pacific Microsystems, Inc., No. 2, R&D Rd. VI, Science-Based Industrial Park, Hsinchu 300, Taiwan

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