Visualization of the Effect of Liquid Dispensing Method during Spin Coating
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概要
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In this study, we investigate how the method of liquid dispensing, including released drop, centered injection and spiral injection, affects the coating efficiency during spin coating processes. The flow visualization indicates that the method of liquid dispensing has a significant effect on the time needed to fully coat the wafer, the minimum liquid volume $\Omega_{\text{min}}$ required for fully coating, and the maximum attainable radius of liquid front $R_{\text{max}}$. Compared with the released drop and the spiral injection, the centered injection takes the longest time to fully coat the wafer mainly due to its very small critical radius $R_{\text{c}}$. Under a constant Bond number, $R_{\text{max}}/\Omega^{1/3}$ for the spiral injection is slightly smaller than those for the released drop and centered injection in the region of high rotational Reynolds number $\mathit{Re}_{\text{w}}$, while the $R_{\text{max}}/\Omega^{1/3}$ for the spiral injection becomes the largest in the region of low $\mathit{Re}_{\text{w}}$.
- 2007-08-15
著者
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Chou Fu-chu
Department Of Mechanical Engineering National Central University
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Chou Fu-Chu
Department of Mechanical Engineering, National Central University, Jhong-li 320, Taiwan, R.O.C.
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Yang Cheng-Pin
Department of Mechanical Engineering, National Central University, Jhong-li 320, Taiwan, R.O.C.
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Huang Kuo-Hsin
Department of Mechanical Engineering, National Central University, Jhong-li 320, Taiwan, R.O.C.
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Huang Kuo-Hsin
Department of Mechanical Engineering, National Central University, Chung-li 320, Taiwan, R.O.C.
関連論文
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- Suppression of Limit Cycles in Servo Systems Using Gain Limit Compensator
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- Visualization of the Effect of Liquid Dispensing Method during Spin Coating
- Cooling of Microspot by Microdroplets
- Effect of Relaxation Time on Spin Coating Instability
- Dynamic Contact Angle of Spreading Thin Film on a Rotating Disk
- Effect of Coriolis Force on Fingering Instability and Liquid Usage Reduction
- Effect of Wind Shear on the Film Thickness Distribution over Rotating Doughnut Disks
- Cooling of Microspot by Microdroplets