Ultrafine Patterning of Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
The growth of nanocrystalline diamond films having an appropriate surface smoothness for nanoscaled ultrafine patterning was investigated. The surface smoothness of polycrystalline diamond films was controlled by introducing nitrogen (N2) gas at concentrations ranging from 0 to 1.0% into the gas mixtures of methane (CH4) and hydrogen (H2) on microwave plasma-assisted chemical vapor deposition (MPCVD). The added 1.0% N2 with 10% CH4 in the gas phase yielded the desired diamond film with the smoothest surface among the conditions. An N-doped nanocrystalline diamond film was fabricated by nanoscaled ultrafine patterning by e-beam lithography followed by reactive ion etching (RIE). As a mask material in RIE, we found that a chemical vapor-deposited amorphous silicon nitride film is appropriate. A mixture consisting of oxygen and a small amount of tetrafluoro carbon was used as the etching gas. We succeeded in achieving a minimum line width of 100 nm in the N-doped nanocrystalline diamond film with our fabrication process.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
-
Ando Toshihiro
National Institute For Materials Science
-
Gamo Hidenori
Technical Research Institute Toppan Printing Co. Ltd.
-
Nishitani-Gamo Mikka
Department of Applied Chemistry and Sensor Photonics Research Center, Toyo University, Kawagoe, Saitama 350-8585, Japan
-
Shimada Kentaro
Department of Applied Chemistry and Sensor Photonics Research Center, Toyo University, Kawagoe, Saitama 350-8585, Japan
関連論文
- Novel Selective Oxidation of Light Alkanes Using Carbon Dioxide. Oxidized Diamond as a Novel Catalytic Medium
- Oxidized Diamond Supported Ni Catalyst for Synthesis Gas Formation from Methane
- Oxidized Diamond:A Novel Support for Catalytic Dehydrogenation
- Low-temperature synthesis of graphitized nanofibers by a spray pyrolysis method and their electrochemical properties (特集 カーボンナノチューブの生成・応用最前線)
- Field-Emission Activation on Boron-Doped Chemical-Vapor-Deposited Polycrystalline Diamond Films
- Diels-Alder Reaction on the Clean Diamond (100) 2×1 Surface
- Emission Characteristics of Amorphous Silicon Field Emitter Arrays Sealed in a Vacuum Package
- Fabrication of a New Field Emitter Array with a Built-in Thin-Film Transistor on Glass
- Fabrication of Field Emitter Arrays with Hydrogenated Amorphous Silicon on Glass
- Characterization of Multi-Walled Carbon Nanotube-Supported Pt Catalyst Prepared by Metal Nanocolloidal Solution for a Polymer Electrolyte Fuel Cell Catalyst
- Fabrication of Petal-Shaped Vertical Field Emitter Arrays
- Fabrication and Characterization of Cross-Edge-Structured Vertical Field Emitter Arrays
- Field Emission Characteristics of Well-Aligned Carbon Nanotubes Synthesized in Organic Liquids
- Hemodialysis-Induced P-Wave Signal-Averaged Electrocardiogram Alterations Are Indicative of Vulnerability to Atrial Arrhythmias
- Composition and Bonding Properties of Carbon Nitride Films Grown by Electrochemical Deposition Using Acrylonitrile Liquid
- Field Emission Current Uniformity and Stability of Well-Aligned Carbon Nanotubes Synthesized in Methanol
- Liquid-Phase Deposition of Aligned Carbon Nanotubes Using Cobalt Catalyst
- Interfacial Nanostructure of the Polymer Electrolyte Fuel Cell Catalyst Layer Constructed with Different Ionomer Contents
- Ultrafine Patterning of Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition