Multipole Ion Trap as Cluster-Ion Source
スポンサーリンク
概要
- 論文の詳細を見る
We have developed a new type of ion trap, an external multipole static attraction ion trap (EMSIT) for use as a cluster-ion source. The EMSIT consists of 36 linear pole electrodes of nearly equal length arranged in a $6\times 6$ square lattice and a cylindrical cage electrode surrounding the pole edges. An ion-trapping field is generated between the multipole and the cage electrode by applying ac and dc voltages to the pole electrodes. Simulation results indicated that the EMSIT can confine the ions with a wide range of mass values in the ion-trapping field and act as a mass-selective ion source using the central four poles as an ion extraction guide. In fact, we observed that Xe+ ions were confined in the EMSIT for more than 1 s in the presence of He buffer gas of $5.0\times 10^{-2}$ Pa. Hydrogenated Si cluster ions, SinH$_{x}{}^{+}$ ($n=2--6$), were grown from SiH4 gas and extracted with mass selection, indicating that the EMSIT acts as a cluster-ion source.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-07-15
著者
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Ohishi Yuji
Department Of Obstetrics And Gynecology Kawasaki Medical School
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Uchida Noriyuki
Advanced Semiconductor Research Center Aist
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Kanayama Toshihiko
Advanced Semiconductor Research Center Aist
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Kimura Kaoru
Department Of Advanced Material Science University Of Tokyo
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Kanayama Toshihiko
Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562, Japan
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Uchida Noriyuki
Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562, Japan
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Sho Tomonari
Department of Advanced Material Science, Graduate School of Frontier Science, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan
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Ohishi Yuji
Department of Advanced Material Science, Graduate School of Frontier Science, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan
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Kimura Kaoru
Department of Advanced Material Science, Graduate School of Frontier Science, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan
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