Structure of Diamond-Like Carbon Film Deposited on Aluminum Oxide Surface with Microstructure

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概要

• 論文の詳細を見る

• We investigated the deposition phenomena of diamond-like carbon (DLC) film on a microstructured Al2O3 surface using an ion-beam technique. In the case of an acceleration voltage of 300 V, the microstructured Al2O3 surface was smoothly coated to have an unevenness of about 200 nm height with DLC film. The hardness of the DLC film indicated maximum values at acceleration voltages of 100–200 V and gradually decreased for acceleration voltages of 300–400 V. By using Raman spectroscopy and Fourier transform infrared spectroscopy, it was shown that the numbers of sp3 bonds in films deposited at acceleration voltages of 100 and 200 V was larger than that of films deposited at acceleration voltages of 300 and 400 V.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-01-15

著者

• Hamagaki Manabu

  Riken

• Nakajima Yoshiyuki

  Riken Keiki Co., Ltd., 2-7-6 Azusawa, Itabashi-ku, Tokyo 174-8744, Japan

• Hashimoto Yuichi

  Global Environment Promotion Headquarters, Canon Inc., 2-9-4 Shimomaruko, Ota-ku, Tokyo 146-8512, Japan

• Kotani Yoshinori

  Global Environment Promotion Headquarters, Canon Inc., 2-9-4 Shimomaruko, Ota-ku, Tokyo 146-8512, Japan

• Yamada Masayuki

  Global Environment Promotion Headquarters, Canon Inc., 2-9-4 Shimomaruko, Ota-ku, Tokyo 146-8512, Japan

• Yamashita Daisuke

  Riken Keiki Co., Ltd., 2-7-6 Azusawa, Itabashi-ku, Tokyo 174-8744, Japan

• Hamagaki Manabu

  RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

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• Structure of Diamond-Like Carbon Film Deposited on Aluminum Oxide Surface with Microstructure

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