Preliminary Evaluation of Mass Attachment Effect of Ceramic Resonator Device Using Plasma Polymerized Styrene Film Deposition Method

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The resonant properties of ceramic resonator device (CRD) coated with plasma-polymerized styrene film (PPSF) during mass loading were examined and compared with those of a quartz crystal microbalance (QCM) device. We tested three 4-MHz CRDs and two 9-MHz QCMs as a reference for PPSF. They were coated experimentally under several plasma-polymerization conditions (100 W of RF power at 13.56 MHz, 100 Pa of monomer pressure). The resonant properties of both devices were measured using an impedance analyzer. The resonance frequency shift is proportional to polymerization time until 240 min ($\Delta F_{\text{r}}=C_{\text{CRD}}t,C=360$ Hz/min for CRD, and $\Delta F_{\text{r}}=C_{\text{QCM}}t,C_{\text{QCM}}=2448$ Hz/min for QCM, respectively). The shift of resonance frequency for CRD is 7.13 ng/Hz. The PPSF-coated CRD showed a lower frequency shift than QCM for mass loading (about 0.14). Shifts of the resistance and $Q$-value during mass loading were not found on the CR, but they were found on the QCM. Those results imply that the low $Q$-value property of CR causes a small resistance shift for mass loading. The PPSF deposition method is suggested as a preliminary standardization of evaluation of the mass loading effect of CRD for applications of chemical sensors and biosensors under a high mass-loading condition.
2006-10-30