Influence of the Ion-to-Atom Ratio on the Structure of CeO2 Buffer Layer by Ion Beam Assisted E-Beam Evaporation
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概要
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Using ion-beam assisted e-beam evaporation with the ion beam directed at 55° to the normal of the film plane, (200) oriented CeO2 films with biaxial texture were deposited on Hastelloy C276 substrates at room temperature. The crystalline quality and in-plane orientation of films was investigated by X-ray diffraction $2\theta$-scan and $\Phi$-scan, atomic force microscopy (AFM). It was shown that the in-plane and out-of-plane textures of the CeO2 films were controlled by the deposition parameters. The orientation of the films was studied as a function of ion-to-atom ratio and film thickness. The ion-to-atom ratio was varied by independently adjusting the deposition rate and the ion current density. Under optimum condition, (200) textured CeO2 films have been successfully grown on Hastelloy C276.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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Koo Won
Department Of Metallurgical System Engineering Yonsei University
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Lee Se
Department Of Dermatology Seoul National University College Of Medicine Laboratory Of Cutaneous Agin
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Jo Sung
Department Of Metallurgical Engineering Yonsei University
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Kim Woo
Department Of Biology College Of Science Yonsei University
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Kim Chang
Department Of Biochemistry University Of Oxford
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Baik Hong
Department of Advanced Materials Engineering, Yonsei University, Seoul 120-749, Korea
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Baik Hong
Department of Metallurgical Engineering, Yonsei University, Seodaemoon Ku, Shinchon Dong 134, Seoul 120-749, Korea
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Lee Se
Department of Advanced Materials Engineering, Kyungsung University, 314-79 Daeyun-dong, Nam-gu, Busan 680-736, Korea
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Kim Chang
Department of Metallurgical Engineering, Yonsei University, Seodaemoon Ku, Shinchon Dong 134, Seoul 120-749, Korea
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Jo Sung
Department of Metallurgical Engineering, Yonsei University, Seodaemoon Ku, Shinchon Dong 134, Seoul 120-749, Korea
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Kim Woo
Department of Metallurgical Engineering, Yonsei University, Seodaemoon Ku, Shinchon Dong 134, Seoul 120-749, Korea
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Jo Sung
Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemoon-ku, Seoul 120-749, Korea
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Koo Won
Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
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Koo Won
Department of Metallurgical Engineering, Yonsei University, Seodaemoon Ku, Shinchon Dong 134, Seoul 120-749, Korea
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