X-ray Shielding of an Ionizer using Low-Energy X-rays below 9.5 keV for Ultra-Clean Assembly Line of Electronic Devices
スポンサーリンク
概要
- 論文の詳細を見る
An ionizer has been developed using a low-energy X-ray for producing ion pairs that are transported by clean air through a shielding plate to objects to be discharged. The shielding plate should shield the X-ray of below 9.5 keV, while it should pass sufficient amount of the ion pairs. In this study, characteristics of the structural condition of the shielding plate has been investigated, on both the shielding effect and the ability to pass the ion pairs. We confirmed the structural condition that the leakage dose rate of the low-energy X-rays could be decreased to less than 1 μSv/h while allowing the passage of enough ion pairs to eliminate the static electricity.
- 2005-07-15
著者
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Matsuhashi Hideaki
Technical R&d Center Techno Ryowa Ltd.
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SUZUKI Masanori
Technical R&D Center, Techno Ryowa Ltd.
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Sato Tomokatsu
Technical R&d Center Techno Ryowa Ltd.
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Mizuno Akira
Department Of Astrophysics Nagoya University
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Matsuhashi Hideaki
Technical R&D Center, Techno Ryowa Ltd., 5-33-6 Kyodo, Setagaya-ku, Tokyo 156-0052, Japan
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Suzuki Masanori
Technical R&D Center, Techno Ryowa Ltd., 5-33-6 Kyodo, Setagaya-ku, Tokyo 156-0052, Japan
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