X-ray Shielding of an Ionizer using Low-Energy X-rays below 9.5 KeV for Ultra-Clean Assembly Line of Electronic Devices
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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MIZUNO Akira
Department of Astrophysics, Nagoya University
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Matsuhashi Hideaki
Technical R&d Center Techno Ryowa Ltd.
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SUZUKI Masanori
Technical R&D Center, Techno Ryowa Ltd.
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SATO Tomokatsu
Technical R&D Center, Techno Ryowa Ltd.
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